A white light interference optical profiler (WL-IOP) operating in the vertical scanning interferometry (VSI) mode has been home-made developed and integrated into a commercial Atomic Force Microscope (AFM). The result is a 3D metrological tool operating with sub-nanometer resolution vertically over a wide range laterally: from 1mm down to 10nm. This is a faster and in many case a higher performance alternative to the more standard stylus profiler / AFM combination.
Details
Title
Inegrated optical profiler and AFM : a 3D metrology system for nanotechnology
Author(s)
Du, A. (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland) Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland ; NanoFeel, Carouge, Switzerland) Foschia, Raphaël (NanoFeel, Carouge, Switzerland)
Date
2005-05
Published in
Proceedings of NSTI Nanotech, the Nanotechnology Conference and Trade Show, 8-12 May 2005, Anaheim, CA, USA
Volume
2005, vol. 2, chapter 11: Characterization Tools and Microscopy, pp. 695-697
Publisher
Anaheim, CA, USA, 8-12 May 2005
Pagination
3 p.
Presented at
NSTI Nanotech: the Nanotechnology Conference and Trade Show, Anaheim, CA, USA, 2005-05-08, 2005-05-12