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Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope

Jobin, Marc; Foschia, Raphael
2006
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Einzelheiten

Titel
Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope
Autor(en)/ in(nen)
Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Datum
2006-07
Veröffentlich in
Microscopy and Microanalysis
Band
2006, no.12, supp. no. 2, pp. 1774-1775
Seitenzahl & Äquivalente
2 p.
DOI
https://doi.org/10.1017/S1431927606063379
ISSN
1431-9276
Artikeltyp
scientifique
Domaine
Ingénierie et Architecture
Ecole
HEPIA - Genève
Institut
inSTI - Institut des Sciences et Technologies industrielles
Fussnote
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
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