Go to main content
Inegrated optical profiler and AFM : a 3D metrology system for nanotechnology
Du, A.; Jobin, Marc; Foschia, Raphaël
2005
Herunterladen
Formate
Formate
BibTeX
MARCXML
TextMARC
MARC
DublinCore
EndNote
NLM
RefWorks
RIS

Résumé

A white light interference optical profiler (WL-IOP) operating in the vertical scanning interferometry (VSI) mode has been home-made developed and integrated into a commercial Atomic Force Microscope (AFM). The result is a 3D metrological tool operating with sub-nanometer resolution vertically over a wide range laterally: from 1mm down to 10nm. This is a faster and in many case a higher performance alternative to the more standard stylus profiler / AFM combination.

Einzelheiten

Titel
Inegrated optical profiler and AFM : a 3D metrology system for nanotechnology
Autor(en)/ in(nen)
Du, A. (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland ; NanoFeel, Carouge, Switzerland)
Foschia, Raphaël (NanoFeel, Carouge, Switzerland)
Datum
2005-05
Veröffentlich in
Proceedings of NSTI Nanotech, the Nanotechnology Conference and Trade Show, 8-12 May 2005, Anaheim, CA, USA
Band
2005, vol. 2, chapter 11: Characterization Tools and Microscopy, pp. 695-697
Verlag
Anaheim, CA, USA, 8-12 May 2005
Seitenzahl & Äquivalente
3 p.
Vorgestellt auf
NSTI Nanotech: the Nanotechnology Conference and Trade Show, Anaheim, CA, USA, 2005-05-08, 2005-05-12
ISBN
0-9767985-0-6
Schlüsselwörter
3D metrology ; white-light interference microscopy ; atomic force microscopy
Papiertyp
short paper
Domaine
Ingénierie et Architecture
Ecole
HEPIA - Genève
Institut
inSTI - Institut des Sciences et Technologies industrielles
Das Dokument erscheint in
Konferenzmaterialien
Global
Externe Ressourcen
Online Proceedings

Aktionen

PDF