Improving the resolution of interference microscopes
Jobin, Marc; Foschia, Raphael
2008

Résumé

We have made an interference optical microscope (IOM) capable of improved resolutions, both vertically and laterally. Atomic steps of graphite have been imaged in phase shift mode (PSM) at large field of view through a proper averaging time during acquisition. We discuss the influence of the illumination and the CCD resolution on the ultimate achievable vertical resolution. To improve the lateral resolution, we report on the integration of the IOM to an atomic force microscope (AFM) in order to take advantage of the 2 nm resolution provided by AFM.

Einzelheiten

Titel Improving the resolution of interference microscopes
Autor(en)/ in(nen) Jobin, Marc (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Foschia, Raphael (School of Engineering, Architecture and Landscape (hepia), HES-SO University of Applied Sciences Western Switzerland)
Datum 2008-10
Veröffentlich in Measurement
Band 2008, vol.41, no. 8, pp. 896-903
Umfang 8 p.
DOI https://doi.org/10.1016/j.measurement.2007.12.006
ISSN 0263-2241
Schlüsselwörter interference microscopy ; phase shift microscopy ; atomic step ; optical resolution ; atomic force microscopy
Artikeltyp scientifique
Domaine Ingénierie et Architecture
Ecole HEPIA - Genève
Institut inSTI - Institut des Sciences et Technologies industrielles
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