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This study describes a thin and lowcost capacitive pressure sensor and a model elaborated by the finite element method (FEM) in touch mode for monitoring fluid pressure from 0 to 40kPa in a perfusion chamber with Luer fittings for medical applications. The touch mode is expected to provide good linearity, large measuring range and large overload protection [1]. The choice of a thin polymer membrane as sensitive element with a printed circular electrode reduces drastically the thickness and fabrication costs in comparison to standard microfabrication processes. A set of assumptions were successfully applied to reduce the computation time of the model which was validated by comparison with experiments. The principle, characteristics and a methodology of FEM model for a specific touch mode capacitive-type pressure sensor are illustrated in the report.

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